Dresden 2011 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 36: Poster Session II (Metals; Nanostructures at surfaces; Surface or interface magnetism; Spin-Orbit Interaction at Surfaces; Electron and spin dynamics; Surface dynamics; Methods; Theory and computation of electronic structure)

O 36.80: Poster

Dienstag, 15. März 2011, 18:30–22:00, P4

Probe-based thermomechanical direct-writing — •Felix Holzner, Philip Paul, Cyrill Kuemin, Michel Despont, Heiko Wolf, Armin Knoll, and Urs Duerig — IBM Research GmbH, Rueschlikon, Switzerland

A probe-based patterning method is presented. The presence of a hot tip leads to a local material desorption from specific organic resists. Structures with a half-pitch of 8 nm have been fabricated. Moreover, 3D patterns can be written by controlling the amount of material removal at each pixel. The method can reach patterning speeds comparable to electron beam lithography (so far a pixel rate of 400kHz).

The poster shows the principle of the patterning process as well as studies of the kinetics of the material evaporation.

Furthermore it is shown how the written 3D structures can be used as traps to catch and align gold nanorods (25 x 75 nm) using Capillary Assembly.