Regensburg 1998 – wissenschaftliches Programm

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M: Metallphysik

M 17: Nanokristalle I

M 17.3: Vortrag

Dienstag, 24. März 1998, 15:50–16:10, H 33

Nanoscaled Gradient Materials by Chemical Vapor Synthesis — •Stefan Seifried, Markus Winterer, and Horst Hahn — Thin Films Division, Materials Science Department, Darmstadt University of Technology, Petersenstr. 23, 64287 Darmstadt

Thick films in the system Si-C-B consisting of crystalline grains with sizes below 70 nm are prepared by a modified Chemical Vapor Deposition method, the Chemical Vapor Synthesis (CVS). One-dimensional gradients in composition and porosity are achieved over film thicknesses up to 150 microns on different substrate materials. The influence of the processing parameters, specifically, precursor partial pressure, total pressure, temperature and reactor position on structure and properties is investigated.