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HL: Halbleiterphysik

HL 7: Poster I

HL 7.37: Poster

Monday, March 26, 2001, 10:30–19:00, Rang S\ 3

Gas sensing with birefringent porous silicon — •Egon Gross, Nicolai Künzner, Dmitri Kovalev, Joachim Diener, and Frederick Koch — Physik-Department E16, Technische Universität München, James-Franck-Str. 1, 85748 Garching

Condensation of vapours and gases in nanometer sized pores has been investigated since decades. On the basis of strongly birefringent dielectrically anisotropic nanostructured silicon we present a new method for the optical investigation of capillary condensation in the voids of the sponge-like structure of porous silicon. The condensation in the pores results in a modification of the birefringent properties of the porous layer and therefore allows to detect extremely small concentrations of dielectric substances.