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M: Metallphysik

M 29: Nanoskalige Materialien III

M 29.5: Fachvortrag

Donnerstag, 29. März 2001, 16:15–16:30, S5.3

In-situ Analysis of Chemical Vapor Synthesis by Aerosol Mass Spectrometry — •In-Kyum Lee, Markus Winterer, and Horst Hahn — TU-Darmstadt, FB 11 FG Duenne Schichten, Petersenstr. 23, 64287 Darmstadt

An Aerosol Mass Spectrometer (AMS) was constructed. It is a combination of a Quadrupol- (QMS) and a Partikel Mass Spectrometer (PMS) and enables the in-situ analysis of gasphase processes to generate nanoparticles. Mass distributions of ultrafine particles in the range of 1e4 amu to 1e8 amu are measured in the PMS. At the same time measurements of molecular species up to 300 amu can be detected in the QMS. Aerosols containing nanocrystalline silicon carbide particles produced from tetramethylsilane by pyrolysis are analyzed by the AMS as a function of process parameters to elucidate the formation and growth mechanism.