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P: Plasmaphysik

P 12: Plasmadiagnostik

P 12.1: Fachvortrag

Mittwoch, 20. März 2002, 12:00–12:30, HZO 70

On Progress in Diagnostics of Molecular Plasmas Using Infrared Tunable Diode Laser Absorption Spectroscopy — •Jürgen Röpcke — Institut für Niedertemperatur-Plasmaphysik Greifswald, Friedrich-Ludwig-Jahn-Str. 19, 17489 Greifswald, Germany

The monitoring of transient or stable plasma reaction products, in particular the measurement of their ground state concentrations, is the key to an improved understanding of plasma chemistry and kinetics in molecular non-equilibrium plasmas, which are increasingly being used not only for basic research but also for materials processing technology. Infrared tunable diode laser absorption spectroscopy (TDLAS) is a modern, promising technique for measuring number densities of stable molecules and radicals. The contribution will focus on progress in the analysis of phenomena in plasmas containing hydrocarbons, organosilicon compounds and boron under stationary and non-stationary discharge conditions. Recent technical developments of compact multicomponent acquisition systems show that TDLAS has specific capabilities for effective and reliable on-line process control in research and industry.