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P: Plasmaphysik

P 3: Low Temperature Plasmas, Plasma Technology

P 3.3: Talk

Monday, March 17, 2003, 16:25–16:45, FO4

Excimer radiation from microhollow cathode discharges in static gas — •Byung-Joon Lee, Isfried Petzenhauser, and Klaus Frank — Physics Department I, University of Erlangen-Nuremberg

Microhollow cathode discharges (MHCD) are high-pressure, non-equilibrium gas discharges. In rare gases, they can be used as a simple and efficient vacuum ultraviolet (VUV) excimer light source. Using pulsed operation efficencies up to 20% in xenon have been reached [1]. The excimer radiation output for different pulse lengths between 1 and 100 µs in argon and xenon has been compared. The efficiency is also depending on the gas purity. In a static gas the purity of the gas decreases during operation. This causes also a decrease of the efficiency of the excimer light source. The effect of this contamination process was measured and will be discussed.

[1] M. Moselhy et al., Appl. Phys. Lett. 79, 1240 (2001)