Regensburg 2004 – wissenschaftliches Programm
CPP 8.4: Vortrag
Montag, 8. März 2004, 16:30–16:45, H 37
Microtribological Properties of Fluorine-Based Polymers Deposited by Sol-Gel — •Phani Ayalasomayajula, Guiseppe Breliozzi, Imad Ahmed, and Henry Haefke — CSEM Swiss Center for Electronics and Microtechnology, Inc., Rue Jacquet-Droz 1, CH-2007 Neuchatel, Switzerland
The versatility of sol-gel processing makes this technology relevant to a wide range of industries. Applications include high-performance, protective coatings against scratch and corrosion, optical fibers and waveguides, filters and membranes, etc. Compared to other deposition techniques, sol-gel has many advantages, such as easy composition control, fabrication of thin films on large surfaces area, film homogeneity, cost effectiveness and simple operation cycles. In the present investigation, sol-gel deposition has been applied to coat three fluorine-based polymer layers with a maximum thickness of 50 nm onto silicon substrates. Prior to deposition, the silicon substrates were etched using HF to remove the native oxide layer. Adhesion, friction and wear were analyzed in the microNewton load regime using a precision microtribometer and compared with the properties of the native oxide covered silicon surface. Film composition, wetting behavior and surface topography were characterized by Rutherford backscattering spectroscopy, contact angle testing and atomic force microscopy, respectively. The obtained structural data has been correlated with the tribological results. It was also found that the degree of hydrophobicity of the coating results in a decrease of the pull-off force. Furthermore, an increase in the molecular weight of the polymer results in a reduction of wear.