Regensburg 2004 – wissenschaftliches Programm

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O: Oberflächenphysik

O 28: Postersitzung (Elektronische Struktur, Grenzfläche fest-flüssig, Halbleiteroberflächen und -grenzflächen, Magnetismus und Symposium SYXM, Methodisches, Nanostrukturen, Oberflächenreaktionen, Teilchen und Cluster, Zeitaufgelöste Spektroskopie)

O 28.50: Poster

Mittwoch, 10. März 2004, 16:00–19:00, Bereich C

Nanostructuring using colloid crystals and dry and wet etching techniques — •Manuel Gonçalves¹, Moritz Trautvetter², Oliver Dubbers², Sebastian Fricker², Alfred Plettl², Paul Ziemann², and Othmar Marti¹ — ¹Department of Experimental Physics, University of Ulm, D-89069 Ulm, Germany — ²Department of Solid State Physics, University of Ulm, D-89069 Ulm, Germany

Sub-wavelength structures produced using latex colloidal crystals have been intensively investigated in the last years, namely to produce photonic crystals. One of most known techniques to produce nanoparticles using monolayers of latex spheres as lithographic masks, has been developed by U. Ch. Fischer et al. in 1981 (Fischer projection patterns or FPP). This method, however, is restricted to few possible particle shapes.

We have developed two techniques to extend the number the possible shapes and geometrical configurations, using colloidal crystals and FPPs combined with dry and wet etching techniques.

Inverse projection pattens have been produced using the common FPPs combined with wet chemical etching.

We have also developed a technique to produce sub-wavelength structures using monolayers of latex spheres etched by a plasma. The size and the separation of the particles can be controlled by the etching level and by selecting the size of the latex spheres.

Several nanostructures using these techniques have been produced and characterized by scanning probe microscopy and scanning electron microscopy. The optical properties of some samples produced using metallic thin films are also presented.