Berlin 2005 – wissenschaftliches Programm
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DS: Dünne Schichten
DS 4: Halbleitende, amorphe und organische Schichten
DS 4.2: Vortrag
Freitag, 4. März 2005, 15:00–15:15, TU HS107
Correlation of plasma parameters and diamond-like carbon films properties — •Oleksiy Filipov, Nicolas Wöhrl, Stephan Reuter, and Volker Buck — Thin Film Technology Group, Dept. of Physics, University of Duisburg-Essen, Universitätsstr.3-5, 45141 Essen, Germany
Diamond-like carbon films such as amorphous hydrogenated a-C:H and non-hydrogenated a-C films, are amorphous materials characterized by attractive mechanical, chemical and optical properties. In order to adjust their properties to tribological and biomedical applications, DLC films were deposited onto different types of substrates by using different deposition methods such as DC-anodic arc and RF-plasma source. The films were deposited on polished (100) Si and glass substrates. The variation in process parameters such as substrate bias and gas admixture is used to influence the film properties. The plasma parameters were monitored during deposition by Langmuir probe and mass-spectrometer. The pulsed bias was applied to substrate in two modes: unipolar and bipolar. The operating gas was H2 at different flow rates. The surface morphology of the deposited films was analysed using Scanning Electron Microscopy (SEM). Residual stress was monitored by SSIOD technique. The structural properties of the films, mostly sp3/sp2 ratio, were characterized by Raman Spectroscopy and by FTIR, their optical properties were ex-situ examined by UV-IR Spectroscopy.