Berlin 2005 – wissenschaftliches Programm
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P: Plasmaphysik
P 14: Poster: Niedertemperaturplasmen / Plasmatechnologie 6, Diagnostik 4
P 14.4: Poster
Samstag, 5. März 2005, 14:45–16:45, Poster HU
The atmospheric pressure plasma jet(APPJ): Characteristics and diagnostics — •S. Reuter, K. Niemi, V. Schulz-von der Gathen, and H.F. Döbele — Universität Duisburg-Essen, Fachbereich Physik, 45141 Essen
The APPJ [1] operates with a high-flow (several m3 h)
helium and small amounts of molecular additives, such as e.g. O2 between
electrodes with RF excitation. The discharge is typically homogeneous and provides an efficient effluent of radicals. Plasma parameters are typically ne ∼ 1011 cm−3 and Te∼2 eV. The plasma operates under ambient conditions. The temperature of the effluent is below 100∘C. The cold and neutral effluent containing highly reactive radicals is considered for etching, coating, in-situ treatment of sensitive tissues. Diagnostics applied to the APPJ are TALIF, OES, thermography, and diode laser absorption spectroscopy. Concentric and planar versions have been realized. The jet can now be operated with argon as feedgas and in a pulsed mode in case of helium. The absolute density profile
of atomic oxygen [2] is compared to results from other diagnostic methods. The
measurements show that the reactive species is present far more outside the jet
than previously expected. VUV radiation is detected at several cm distance
from the noozle in air. The diagnostics include also metastable Helium or Argon Atoms.
Supported by the ’Ministerium für Wissenschaft und Forschung des Landes Nordrhein-Westfalen’.
[1] Selvyn et al. 1998 IEEE Trans. Plasma Sci. 26 1685
[2] K. Niemi; see contribution at this meeting