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Dresden 2006 – wissenschaftliches Programm

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HL: Halbleiterphysik

HL 42: Quantum dots and wires: Preparation and characterization I

HL 42.6: Vortrag

Donnerstag, 30. März 2006, 12:15–12:30, POT 51

Advanced and selective growth of ZnO nanopillars in wet chemical solution — •Bianca Postels, Marc Kreye, Hergo-H. Wehmann, and Andreas Waag — Institut für Halbleitertechnik, Technische Universität Braunschweig, Hans-Sommer-Str. 66, 38106 Braunschweig, Germany

ZnO nanostructures have a large potential for interesting applications in optoelectronics and sensor technologies. Different methods like MOCVD, VPE and ACG (Aqueous Chemical Growth) can be used for generating a variety of nanostructures. In recent years, ACG became more and more interesting, being a low temperature (< 95) and low cost approach. Usually, the ACG process is based on the creation of a nucleation layer followed by the growth of ZnO nanopillars in aqueous solution.

In this contribution we will show that by using ACG we are able to generate highly homogeneous and vertically aligned, densely packed (~ 1e10 cm-2) wafer scale arrays of ZnO nanopillars on various substrate materials, e.g. Si (100, 111) and ITO coated glass as well as on polymer substrates (PEN foil, silicones). Results from detailed structural and electrical analysis will be reported. Even though grown at low temperatures in aqueous solution, the nanopillars show a surprisingly good optical quality at room temperature. To achieve selective growth, we grew on samples without nucleation layer structured with different metals on various substrate materials. We observed homogenous, densely packed arrays of ZnO nanopillars on metals, whereas on pure substrate materials only low density growth occurs.

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