Dresden 2006 – wissenschaftliches Programm

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O: Oberflächenphysik

O 26: Particles and clusters I

O 26.2: Vortrag

Dienstag, 28. März 2006, 16:00–16:15, WIL A317

Deviations in exp. and calc. sputtering yields of Cu, Ag, and Au with keV noble gas ions — •Wolfgang Eckstein¹ and Rainer Behrisch² — ¹IPP, 85748 Garching ,MPI — ²IPP, 85748 Garching, MPI

The sputtering yields of metals have been calculated for noble gas ions at different incident energies with the program TRIM.SP. The results in dependence on the incident energy have been approximated with an algebraic formula. In the plots representing the energy dependence of the sputtering yield, the sputtering yields which have been measured by different authors are introduced. For most solids the measured yields scatter within a factor of two around the calculated curves. However, for the noble metals Cu, Ag, and Au the measured yields are systematically about a factor of two higher than the calculated values. Possible reasons for this discrepancy are that the surface binding energy is lower than the heat of sublimation taken in the TRIM.SP calculations. This may be caused by surface roughening during ion bombardment. Surface atoms may be moved to places with a lower binding energy. Due to the roughening also atom clusters may be released, which is not included in TRIM.SP.program. Another reason could be deviations in the interaction potential used as input in the calculations.