Dresden 2006 – wissenschaftliches Programm
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O: Oberflächenphysik
O 27: Scanning probe techniques II
O 27.12: Vortrag
Dienstag, 28. März 2006, 18:30–18:45, WIL B321
Influence of wettability on microtribological properties of microsystems — •Wolfram Hild1, Yonghe Liu1, Michael Schuch1, Matthias Scherge2, and Juergen A. Schaefer1 — 1Institut für Physik und Zentrum für Mikro- und Nanotechnologien, TU Ilmenau, P.O. Box 100565, 98684 Ilmenau, Germany — 2IAVF Antriebstechnik AG, Im Schlehert 32, 76187 Karlsruhe
The capillary force formed by water at smooth hydrophilic surfaces plays a crucial role in the performance and reliability of microelectromechanical systems. Capillary forces may lead to malfunctions. The negative influence of water can be excluded by various techniques, e.g. by using hydrophobic Self Assembled Monolayers (SAMs). We report the influence of wettability on the microtribological properties of Si. A microtribometer with a force resolution of 100 nN was employed to study the tribological properties of hydrophilic and hydrophobic microcontacts in air and immersed in water. The wettability of silicon surfaces was changed by etching with piranha solution (contact angle [CA] immeasurable small) and by SAMs (CA 110∘). Micro friction was measured as a function of external load and sliding velocity in both environments. The influence of wettability on friction and adhesion is discussed.