Regensburg 2007 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 27: Polymer and Composite Films

DS 27.2: Vortrag

Freitag, 30. März 2007, 09:45–10:00, H32

Pulsed laser deposition of PMMA thin films — •Britta Lösekrug, Thorsten Scharf, and Hans-Ulrich Krebs — Institut für Materialphysik, University of Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen

Thin films of Poly(methyl methacrylate) (PMMA) are of special interest for instance as photoresist or coating material. Here pulsed laser deposition (PLD) has proven to be an effective and flexible method. The influence of the laser fluence during deposition on the film structure, morphology and roughness was studied by FTIR, REM, AFM and XRR. It is shown that close to the deposition threshold (between 50 and 125 mJ/cm²) completely smooth (roughness at 600 nm thickness: 0.7 nm) and droplet-free films can be prepared. In contrast, at higher laser fluences two components are formed, a smooth cross-linked film and droplets (with a diameter of up to 10 µm) consisting of polymer with reduced chain length [1]. The origin of the droplet formation and the ablation mechanisms are discussed.

[1] E. Süske, T. Scharf, T. Junkers, M. Buback, H.U. Krebs, J. Appl. Phys. 100 (2006) 014906.