Regensburg 2007 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 13: Poster 1

HL 13.75: Poster

Montag, 26. März 2007, 15:00–17:30, Poster A

Functionalized macroporous silicon structures for ir-radiation and chemical sensing applications — •Benjamin Gesemann and Ralf Wehrspohn — Microstructure based material design group, MLU Halle-Wittenberg, Heinrich-Damerow-Strasse 4, D-06120 Halle

In recent years ordered macroporous silicon structures have been used for photonic crystal studies. Beside that they also offer a huge potential for ir-radiation and chemical sensing applications.

We enhanced processes to fabricate high aspect ratio ordered membrane structures with complex shapes for functional devices. The µm-sized porosity as well as mm- and cm-sized outer and inner shapes for a functional chip-design can be etched in a single process. We will show measurements and calculations for thermal emission- as well as gas sensing properties of functionalized coated macroporous silicon devices.