Regensburg 2007 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 40: SiC

HL 40.2: Vortrag

Donnerstag, 29. März 2007, 12:45–13:00, H15

Biofunctionalization of Silicon Carbide — •Marco Hoeb¹, Sebastian Schoell¹, Martin Huth², Bert Nickel², Martin Stutzmann¹, Martin Eickhoff¹, and Martin S. Brandt¹ — ¹Walter Schottky Institut, Technische Universität München, Am Coulombwall 3, 85748 Garching, Germany — ²Department für Physik, Ludwig-Maximilians-Universität München, Geschwister-Scholl-Platz 1, 80539 München, Germany

SiC is an attractive semiconductor for biosensor applications, because of its large bandgap and superior stability. However, the SiC-surface chemistry in particular with respect to the covalent attachment of organic molecules has remained largely unexplored. We have investigated the functionalization of n-type 6H-SiC via silanization (APTES), where molecules are bound to a hydroxylated surface. The chemical, structural, and electronic properties of functionalized SiC were investigated on both the Si-terminated (0001) and the C-terminated (0001) surface, using contact angle, AFM, fluorescence microscopy, XPS, thermal desorption spectroscopy (TDS), SAXS, and current-voltage measurements. Our data indicate a covalent attachment of the organosilane molecules to both the Si- and the C-terminated surface. A homogeneous coverage with active functional amino end groups was demonstrated via fluorescence micropatterning. However, SAXS and TDS suggest a lower average surface coverage on the C-terminated compared to the Si-terminated surface.