Regensburg 2007 – wissenschaftliches Programm
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HL: Fachverband Halbleiterphysik
HL 46: Poster 2
HL 46.50: Poster
Donnerstag, 29. März 2007, 15:00–17:30, Poster A
Optical characterization of hexagonal MgxZn1−xO thin films grown by pulsed laser deposition — •Alexander Müller, Gabriele Benndorf, Susanne Heitsch, Holger Hochmuth, Chris Sturm, Rüdiger Schmidt-Grund, Christoph Meinecke, and Marius Grundmann — Universität Leipzig, Fakultät für Physik und Geowissenschaften, Institut für Experimentelle Physik II, Linnéstr. 5, D-04103 Leipzig, Germany
Ternary alloys of MgxZn1−xO have been grown by pulsed laser deposition (PLD) on a-plane sapphire substrates. The Mg content in the thin films was varied by using PLD-targets with MgO concentrations between 0 wt.% and 25 wt.% and by applying different oxygen partial pressures from 1.6× 10−2 mbar to 5× 10−5 mbar.
In order to characterize the optical properties and to optimize the growth conditions of the layers, we performed photoluminescence (PL) and spectroscopic ellipsometry measurements. The composition of the thin films was determined by Rutherford back scattering spectrometry. A lower O2 partial pressure during the deposition leads to an increasing Mg content in the layer. Consistently, the band gap energy as well as the PL maximum is shifted to higher energies. PL emission was observed up to a Mg concentration of about 35 % in the thin films. The FWHM of the PL increases with higher Mg content. Furthermore, the dependence of the layer thicknesses and the optical properties on the O2 partial pressure and target Mg concentration were examined.