Regensburg 2007 – wissenschaftliches Programm
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O: Fachverband Oberflächenphysik
O 17: Poster Session I (Nanostructures at Surfaces; Metal Substrates: Epitaxy and Growth; Methods: Scanning Probe Techniques; Phase Transitions)
O 17.23: Poster
Montag, 26. März 2007, 17:30–20:30, Poster C
Controlled fabrication of nanopit-patterns on a graphite surface using focused ion beams and oxidation — •Farhad Ghaleh1, Robert Köster1, Heinz Hövel1, Lars Bruchhaus2, Sven Bauerdick2, Jürgen Thiel2, and Ralf Jede2 — 1Universität Dortmund, Experimentelle Physik I, 44221 Dortmund — 2Raith GmbH, Hauert 18, Technologiepark, 44227 Dortmund
We produced nanopits on a highly oriented pyrolytic graphite (HOPG) substrate arranged in a given pattern with a combination of Focused Ion Beam (FIB) irradiation and an oxidation process. The FIB irradiation was carried out using a newly developed dedicated FIB nano fabrication tool [J. Gierak et al., Appl. Phys. A 80, 187 (2005)]. After oxidation of the sample surface defects produced by single ions were imaged as one monolayer deep nanopits with scanning tunneling microscopy. The penetration depth of the ions could be measured by oxidation of the defective volume produced on points irradiated with high ion doses. An array of well separated nanopits with a periodicity of 50 nm could be produced.