Dresden 2009 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 47: Methods: Scanning probe techniques II

O 47.8: Vortrag

Donnerstag, 26. März 2009, 12:15–12:30, SCH A316

Nanometer Resolution of Materials Properties with Scanning Microwave Microscopy — •Matthias Fenner, Wenhai Han, and Hassan Tanbakuchi — Agilent Technologies, 61476 Kronberg, Germany

Advances in scanning probe microscopy have led to the introduction of new tools for local characterization of surfaces and materials at the nanoscale, beyond basic topography and structure. We are proposing a new technique that was realized by combining Agilent's core competencies in the interdisciplinary fields of electronic test and measurement, nanotechnology, and life sciences. This new scanning microwave microscopy (SMM) platform enables the simultaneous measurements of AFM data and traditional microwave network analysis. SMM measures the electrical properties of a material (i.e. dielectric properties, capacitance, and complex impedance), providing researchers in polymer science, semiconductors, and bioscience a new analytical tool for advancing research. This presentation will review our SMM implementation and an explanation of the technical challenges in developing this new technology. We will show the latest results followed by potential benefits this new technology might bring other scientific disciplines.