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Hannover 2010 – scientific programme

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K: Fachverband Kurzzeitphysik

K 4: Laseranwendungen und Lasermaterialbearbeitung I

K 4.1: Invited Talk

Thursday, March 11, 2010, 10:30–11:00, F 442

Biomimetic Sub-Wavelength Structures and Interfaces for Laser based Applications — •Robert Brunner1, Michael Helgert1, Dennis Lehr1, Marcel Schulze2, Ernst-Bernhard Kley2, Christoph Morhard3, Claudia Pacholski3, and Joachim Spatz31Carl Zeiss Jena GmbH, Jena, Germany — 2FSU Jena, Institute of Applied Physics, Jena, Germany — 3Max-Planck-Institute for Metals Research, New Materials and Biosystems, Stuttgart, Germany

The quality of laser optical instruments is affected strongly by the reflection and transmission of light at the optical interfaces. Today, most frequently used antireflection (AR) coatings are based on multilayer interference structures. An alternative are subwavelength structured anti-reflecting surfaces, which are also found in nature on the corneal surfaces of night active insects (*moth eye structures*). Thin-film coatings may suffer from adhesion problems and show a limited wavelength or angle dependency. Additionally for some applications (e.g. in the deep-UV), the available material selection is also limited. These disadvantageous may be overcome by the use of the *moth eye* approach. Here we report on different fabrication technologies, especially Block Copolymer Micelle Nanolithography (BCML), Statistical Anisotropic Etching and Interference Lithography. We discuss the influence of in-homogeneities and the application of the different technologies to microstructured elements.

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