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MI: Fachverband Mikrosonden

MI 2: Electron Backscattering and Kossel X-Ray Diffraction

MI 2.1: Invited Talk

Monday, March 14, 2011, 09:30–10:15, BEY 81

Diffraction techniques in the scanning electron microscope: making SEM a universal tool for microstructure research — •Stefan Zaefferer — Max-Planck-Institut für Eisenforschung, Max-Planck-Str. 1, D-40237 Düsseldorf

The scanning electron microscope (SEM) is a well-established instrument for surface observation and analysis of chemical composition of small volumes using x-ray spectroscopy. The application of diffraction methods in the SEM is, in contrast, by far not fully exploited. The basic principles of the three main diffraction techniques available in the SEM, namely electron backscatter diffraction (EBSD), electron channelling contrast imaging (ECCI), and Kossel x-ray diffraction will be shortly introduced. Subsequently the focus will be on the two electron diffraction techniques. Exciting new fields of applications are measurement of residual elastic stresses by pattern cross-correlation, quantitative description of dislocations using the Nye-tensor approach, 3-dimensional microstructure characterization based on automated serial sectioning and accurate and statistically meaningful texture measurements (all by EBSD) and observation of individual lattice defects as dislocations, stacking faults or nano-twins with high contrast and resolution by ECCI. The techniques will be discussed in terms of their possibilities and limits in particular with respect to the conventional TEM electron diffraction methods and x-ray diffraction (XRD) techniques. It will be shown that the techniques are about to become serious competitors of these methods for the investigation of crystalline materials.