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Berlin 2012 – scientific programme

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MA: Fachverband Magnetismus

MA 47: Micro- and Nanostructured Magnetic Materials II

MA 47.7: Talk

Thursday, March 29, 2012, 18:45–19:00, EB 202

Co/Pd multilayers on SiOx pillar arrays at ultra-high density — •Fabian Ganss1, Birgit Hebler1, Andrea Cattoni2, Anne-Marie Haghiri-Gosnet2, and Manfred Albrecht11Institute of Physics, Chemnitz University of Technology, 09107 Chemnitz, Germany — 2Laboratory for Photonics and Nanostructures, CNRS, 91460 Marcoussis, France

In order to demonstrate the preparation of ultra-high density bit patterned media, Co/Pd multilayers with perpendicular magnetic anisotropy were sputter deposited onto arrays of SiOx pillars. These substrates were prepared by electron beam lithography and high temperature post-baking of HSQ resist [1] and provide pillars of various diameters at different pitches down to 26 nm, the latter corresponding to a potential storage density of 1.1 Tbit/in2. The deposition was carried out under different deposition angles up to 60 to investigate the benefit of the shadowing effect while keeping a constant layer thickness by compensating the lower effective deposition rate by an increased process time. SQUID-VSM measurements of these films on planar substrates confirm comparable magnetic properties. The coated pillar arrays were investigated by MFM to prove exchange decoupling between the magnetic dots and estimate the switching field distributions. The exchange decoupling was proven successfully at densities up to 0.95 Tbit/in2.

[1] A. Cattoni et al., Microelectron. Eng. 87, 1015-1018 (2010)

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