Berlin 2012 – wissenschaftliches Programm
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O: Fachverband Oberflächenphysik
O 76: Nanostructures at surfaces IV
O 76.5: Vortrag
Donnerstag, 29. März 2012, 17:00–17:15, MA 042
Highly sensitive gas sensors based on three-dimensional surface nano-patterns realized by UTAM nano-structuring technique — •Yan Mi1,2, Zhibin Zhan1,2, Hui Sun1,2, Fabian Grote1,2, Huaping Zhao1,2, and Yong Lei1,2 — 1Fachgebiet 3D-Nanostrukturierung, Institut für Physik & Zentrum für Mikro- und Nanotechnologien (ZIK MacroNano), Technische Universität Ilmenau, 98693 Ilmenau, Germany — 2Institut für MaterialPhysik, Westfälische Wilhelms-Universität Münster, 48149 Münster, Germany
Using an innovative three-dimensional (3D) surface nano-structuring technique, highly ordered functional surface nano-patterns can be synthesized with high application potentials. In this talk, we demonstrate an excellent device application of the 3D surface nano-patterns - gas sensors with extremely high sensitivity. The basic structures of the high sensitive gas sensors are template-prepared ZnO nanotube arrays via atomic layer deposition process. The sensitivity of the gas sensor to NO2 gases could reach 25 ppb level, which has not been reported before for commercial gas sensors. Such kind of high sensitivity to NO2 is quite attractive to environmental protection and atmospheric quality monitoring. The high regularity and controllability to the structural parameters of the 3D nano-patterns make it possible to investigate the surface chemistry and physics of the gas sensors and hence to optimize the device performance.