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P: Fachverband Plasmaphysik

P 19: Poster: Theorie und Modellierung

P 19.22: Poster

Thursday, February 28, 2013, 14:00–16:00, Poster EG

Investigation of nonlinear dynamics in capacitively coupled radio frequency discharges — •Schabnam Naggary, Abd elfattah Elgendy, Thomas Mussenbrock, and Ralf Peter Brinkmann — The Institute for theoretical electrical engineering, Ruhr university Bochum, Germany

Capacitively coupled radio frequency plasmas (CCP-RF) are widely used in material processing. Considering of the complicated analysis of the dynamic behavior of CCP-RF discharges, global models provide a simple understanding of these dynamics with relatively little effort.

Based on the matrix sheath model approach and description of the nonlinear charge-voltage characteristics of the sheath by a quadratic approximation, the global model yields a reasonable approximation of the RF current through the discharge. However, a more accurate description of the dynamics of CCP-RF discharges needed by the most plasma technologies can be obtained by applying a more exact sheath model realized by a cubic charge-voltage characteristic. This work shows that a small variation in the cubic charge-voltage characteristic compared to the quadratic approximation leads to considerably modification of the RF current which in turn has a significant influence on the power dissipation in the plasma.