Dresden 2014 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 1: Application of Thin Films
DS 1.12: Vortrag
Montag, 31. März 2014, 12:30–12:45, CHE 91
Fabrication of Multilayer Zone Plates for hard x-ray point nano focusing — •C. Eberl1, F. Döring1, F. Schlenkrich1, T. Liese1, V. Radisch1, M. Osterhoff2, A. Robisch2, A. Ruhlandt2, S. Hoffmann2, M. Krenkel2, M. Bartels2, M. Sprung3, H.U. Krebs1, and T. Salditt2 — 1Institut für Materialphysik — 2Institut für Röntgenphysik, University of Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, Germany — 3HASYLAB at DESY, Notkestr. 85, 22607 Hamburg, Germany
X-ray microscopy is due to the small wavelength and high penetration depth an auspicious technique for improved investigations of materials on nm-scale. For this, multilayer zone plates (MZP) with thin multilayers grown on wires are promising optical elements. Different materials such as W/Si, W/ZrO2 and Ta2O5/ZrO2 were used for the growth of high quality multilayers by pulsed laser deposition (PLD). They were investigated by X-ray reflectivity, transmission electron microscopy in cross-section and in-situ rate monitoring approving high accuracy in layer thickness as well as smoothness and well defined interfaces. In contrast to sputter deposition, where mostly cumulative roughness is observed, PLD shows smoothing effects, even on wires which is due to the energetic particle deposition. Only based on the knowledge of the underlying deposition processes high quality multilayers according to the zone plate law could be deposited onto a wire. Using these coated wires, highly precise MZP optics were fabricated by focused ion beam (FIB) showing hard x-ray point focusing with unprecedented focal sizes of less than 5 nm.