Dresden 2014 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 1: Application of Thin Films
DS 1.13: Vortrag
Montag, 31. März 2014, 12:45–13:00, CHE 91
Interface investigation of ion-beam deposited Chromium/ Scandium multilayer mirrors — •Stefan Radünz1,2, Alexander Guggenmos1,2, Roman Rauhut1,2, Bert Nickel3, Sriram Venkatesan4, Angela Wochnik4, Christina Scheu4, Eric M. Gullikson5, Ferenc Krausz1,2, and Ulf Kleineberg1,2 — 1LMU München, Fakultät für Physik, Garching, Germany — 2MPQ, Garching, Germany — 3CeNS, LMU München, München, Germany — 4LMU München, Fakultät für Chemie, München, Germany — 5CXRO, Lawrence Berkeley National Lab, Berkeley, USA
Highly reflective multilayer mirrors for beam steering, spectral shaping or as focusing elements for the water window spectral range, between the K-absorption edges of carbon and oxygen (284 eV and 543 eV, respectively) are of great interest for various applications like high-resolution microscopy, time-resolved (soft) x-ray spectroscopy or x-ray astronomy. Their demand for low-photon loss optics challenges the manufacturing process to create interfaces as perfect as possible due to the huge loss in reflectivity which arises from boundary imperfections. We present our achievements in minimizing the interface roughness of ion-beam deposited Cr/Sc multilayer mirrors by optimizing the kinetic energy of the utilized Krypton ions both in the deposition and the interface polishing process. The characteristics of our ion-beam polished nanolayers can be investigated using in-situ ellipsometry. Experimental results from measurements using X-ray reflectometry, spectral ellipsometry and XUV reflectrometry as well as TEM cross section images are shown and discussed.