Dresden 2014 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 1: Application of Thin Films
DS 1.7: Vortrag
Montag, 31. März 2014, 11:15–11:30, CHE 91
Multisegment-actuated micro-lenses based on ultrathin diamond membranes — •Johannes Fries1, Verena Zuerbig1,2, Wilfried Pletschen1, Christoph E. Nebel1, Oliver Ambacher1,2, and Vadim Lebedev1 — 1Fraunhofer IAF, Freiburg, Germany — 2IMTEK, University of Freiburg, Germany
The drawback of modern tunable micro-lenses based on polymers or silicon is the limitation in their mechanical and tribological properties. In order to overcome these limits, nanocrystalline diamond (NCD) elastic layers were combined with piezo-actuators made from aluminium nitride (AlN) or lead zirconate titanate (PZT). NCD thin films have excellent properties for manufacturing mechanically stable, ultrathin membranes, e.g. a high Young's modulus and an optical transparency from infrared to deep UV. In such ultrathin unimorph structures heavily boron-doped NCD layers (B:NCD) can serve as transparent front electrodes with conductivities up to 100 S/cm. Such bilayer structures were used to fabricate circular membranes. These unimorph membranes were tested towards their electrical, mechanical and optical properties. Finally, membrane-based multisegment piezo-actuated micro-lenses were fabricated. The performance of the micro-lenses was analyzed statically using white light interferometry and dynamically using laser Doppler vibrometry. Symmetric and asymmetric deflection of the lens surface was demonstrated by applying different voltages on each independent segment. These mirco-lenses can be used as focus and aberrations corrector in complex optical systems.