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DS: Fachverband Dünne Schichten

DS 16: Focus Session: Sensoric Micro and Nano-systems II

DS 16.1: Invited Talk

Tuesday, April 1, 2014, 14:00–14:30, CHE 89

Carbon Wonderland from an Engineering Perspective — •Franz Kreupl, Stefan Kapser, and Sebastian Hübner — TUM, Department of Hybrid Electronic Systems, Munich, Germany

A fresh look on carbon-based materials like carbon nanotubes (CNTs) or graphene in microelectronic applications will be given. Graphene has just passed the peak of inflated expectations and is heading towards the trough of disillusionment from where CNTs are just recovering. In contrast to short scale SWCNTs, graphene nanoribbons - even with bandgap - are not promising candidates for a better transistor. However, interconnects made of multi-layer graphene show promise in a wide range of applications. Through-Silicon-Vias (TSV), capacitors, metal gate, diodes, membranes, memories and sensors will be discussed. These applications are heavily based on the direct deposition methods which we have developed over the past decade.