Dresden 2014 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 11: Nanostructures at Surfaces I

O 11.11: Vortrag

Montag, 31. März 2014, 13:00–13:15, WIL C107

Parallel Fabrication of User Defined Patterns Using Scanning Particle Lens Array — •Wei Guo — Manufacturing Technology Research Laboratory, B38f Sackville Street Building, School of Mechanical Aerospace and Civil Engineering, The University of Manchester, Manchester, M13 9PL

Direct laser writing of parallel patterns over a large area is achieved by an efficient and low-cost technique using scanning particle lens array. With near-field enhancement created by particle lenses, a single laser beam can be split into millions of nano laser jets. By scanning the laser beam at various angles, user defined patterns such as lines, curves and even letters can be generated simultaneously. Up to 100 million periodic features with nano or sub-micro scale can be produced within tens of seconds over an area of 5 mm * 5 mm. In addition, overwriting same patterns on previous locations can be performed without any relocation or misalignment issues.