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Berlin 2015 – scientific programme

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DS: Fachverband Dünne Schichten

DS 19: Ion and electron beam induced processes

DS 19.9: Talk

Wednesday, March 18, 2015, 12:00–12:15, H 2032

LMIS-Injector-Module including a beam formation unit for the generation of high mono- and polyatomic ion currents — •Philipp Laufer1, Daniel Bock1, Wolfgang Pilz1, Lothar Bischoff2, and Martin Tajmar11Technische Universität Dresden, 01062 Dresden — 2Helmholtz-Zentrum Dresden-Rossendorf, Bautzner Landstr. 400, 01328 Dresden

A high current Liquid Metal Ion Source (LMIS) module including ion optics for beam formation is developed. This spin-off from aerospace research for ion propulsion units enables ion currents in the order of 100 µ A [1]. A reservoir of more than 1 g propellant is used to guarantee long-term operation. The small module has a length and a diameter of 8 cm each. The ion optical components are designed and optimized by state-of-art simulation-tools to focus the highly divergent ion beam to a nearly parallel beam of about 2 mm diameter. About 10% of the total emitted current are cluster ions [2]. Together with a mass separating system the module will offer high polyatomic ion currents, which can be used to manufacture nanostructured or smooth surfaces on cm2 area. Moreover, the module can be applied as a sputter tool for analysis of solid surfaces. As the majority of the sputtered particles are neutral the combination with an Electron Beam Ion Source (EBIS) [3] would enable to ionize these particles for mass analysis or to generate highly charged ions.

[1] M. Tajmar, et al., Ultramicroscopy 111 (2010)

[2] L. Bischoff, et al., Nucl. Instr. and Meth. B 272 (2012) 198

[3] M. Schmidt, et al., 12th Int. Symp. on EBIS a. Traps (EBIST’14)

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