Berlin 2015 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 2: Thin Film Characterisation I: Structure Analysis and Composition

DS 2.2: Vortrag

Montag, 16. März 2015, 09:45–10:00, H 0111

Reference-free, depth dependent characterization of nanoscale materials by combined X-ray reflectivity and grazing incidence X-ray fluorescence analysis — •Philipp Hönicke¹, Matthias Müller¹, Blanka Detlefs², Claudia Fleischmann³, and Burkhard Beckhoff¹ — ¹Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587 Berlin, Germany — ²CEA-LETI, 17 rue des Martyrs, 38054 Grenoble, France — ³imec, Kapeldreef 75, BE-3001 Leuven, Belgium

The accurate in-depth characterization of nanoscaled systems is an essential topic for todays developments in many fields of materials research, especially in the semiconductor related ones.

Synchrotron-based Grazing Incidence X-ray Fluorescence (GIXRF) analysis in combination with X-Ray Reflectometry (XRR) provides additional access to the optical properties of the sample allowing for an improved characterization reliability of GIXRF [1].

Employing the radiometrically calibrated instrumentation at the laboratory of the Physikalisch-Technische Bundesanstalt at the BESSY II synchrotron radiation facility, the combination of XRR and GIXRF allows for a more reliable reference-free quantitative in-depth analysis [1,2,3].

[1] P. Hönicke et al., JAAS 27, (2012), 1432.

[2] M. Müller et al., Materials 7(4), (2014), 3147.

[3] P. Hönicke et al., Solid State Phenomena 195, (2013), 274.