Berlin 2015 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 36: Poster Session I

DS 36.49: Poster

Donnerstag, 19. März 2015, 09:30–12:00, Poster A

Controlling the Phase Transition of Sputtered TiO₂ Thin Films by Doping — •Anton Neumann¹, Sebastian Mäder¹, Roland Sittner¹, Rüdiger Schmidt¹, and Matthias Wuttig^1,2 — ¹I. Physikalisches Institut (IA), RWTH Aachen University, Germany — ²JARA - Fundamentals of Information Technology, RWTH Aachen University, Germany

Coated glasses play a significant role in our everyday life, for example in windows, eyeglasses, mobile devices or solar cells. All these applications demand very different requirements like anti-reflex-, self-clea-
ning-, scratch-resistant- or optical index matched surfaces. Glasses coated with thin TiO₂ films can provide any of these properties. By carefully adjusting the deposition conditions, the film characteristics can be significantly altered as the two acquirable crystalline phases, Anatase and Rutile, differ significantly in their physical properties. Due to its very good scalability, magnetron sputtering is the most utilized technique to deposit these TiO₂ thin films.
In this study, we show that by adjusting the cationic dopant concentration in the TiO₂ films produced by magnetron sputtering, one is able to tailor the onset temperature and speed of the phase transition from Anatase to Rutile. To investigate the crystalline structure of our samples, X-ray diffraction was performed before and after annealing the samples at various temperatures. In addition optical properties were investigated via UV/VIS-spectrometry and ellipsometry.