Regensburg 2016 – scientific programme
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HL: Fachverband Halbleiterphysik
HL 31: Silicon-based Semiconductors I
HL 31.1: Talk
Tuesday, March 8, 2016, 12:15–12:30, H14
Ultrahigh Sensitivity Chemical and Biological Sensors Based on Silicon Junctionless Nanowire Transistors — •Yordan M. Georgiev1, Ran Yu2, Elizabeth Buitrago3, Adrian M. Nightingale4, Olan Lotty2, Nikolay Petkov2, and Justin D. Holmes2 — 1Institute of Ion Beam Physics & Materials Research, HZDR, Dresden, Germany — 2Materials Chemistry and Analysis Group, Department of Chemistry and Tyndall National Institute, UCC, Cork, Ireland — 3Nanoelectronic Devices Laboratory, EPFL, Lausanne, Switzerland — 4Nanostructured Materials & Devices Group, Department of Chemistry, Imperial College London, UK
Junctionless nanowire transistors (JNTs) are very promising as chemo- biosensors due to their simple structure, easy fabrication and potential for ultrahigh sensitivity. Therefore, JNT sensors with various numbers, lengths, and widths (down to 10 nm) of the nanowires were fabricated by a top-down process on positively doped SOI wafers. The nanowires were functionalised either with 3-aminopropyltriethoxysilane (APTES) or with APTES and biotin. Polydimethylsiloxane (PDMS) stamps with microfluidic channels were then attached to the chip surface and buffer solutions containing different analytes were flowed over the sensors by a syringe pump. In this way, series of experiments for sensing ionic strength, pH value, and the protein streptavidin were performed. The JNT sensors demonstrated the highest sensitivity reported to date towards streptavidin, corresponding to a detection of only few protein molecules.