Regensburg 2016 – wissenschaftliches Programm
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MM: Fachverband Metall- und Materialphysik
MM 26: Poster session II
MM 26.14: Poster
Dienstag, 8. März 2016, 18:30–20:30, Poster B3
An Improved Method for Point Deflection Measurements on Rectangular Membranes — •Benoit Merle1, Kyle Nicholson1, Erik Herbert2, and Mathias Göken1 — 1Materials Science & Engineering 1, Friedrich-Alexander-University Erlangen-Nürnberg (FAU), Erlangen, Germany — 2Materials Science & Engineering, Michigan Technological University, Houghton, USA
The point deflection method has recently emerged as a possible alternative to current micromechanical techniques for measuring the residual stress of thin films. A point deflection experiment consists into deflecting a clamped membrane in its center with a nanoindenter tip. The widespread availability of the required equipment makes the method very promising for future applications. These outlooks were further enhanced by the recent extension of the evaluation theory to rectangular membranes, which - unlike circular ones - are easily fabricated by standard lithographic techniques. In this work, the recent theoretical advances were critically reviewed and an improved experimental method based on the measurement of the contact stiffness was implemented. The new method was applied to the measurement of the residual stress of 100-nm thick SiNx and TiO2 membranes. The accuracy of the point deflection experiments was assessed by testing the same samples a second time with the bulge test reference technique. It is shown that the new experimental method dramatically improves the reproducibility of the measurements, and suggestions are made to improve the current evaluation scheme.