Dresden 2017 – scientific programme

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DS: Fachverband Dünne Schichten

DS 36: Postersession I

DS 36.12: Poster

Wednesday, March 22, 2017, 17:00–19:00, P2-EG

Synthesis of Carbon Nanowalls from a single source metalorganic precursor — •Nicolas Wöhrl, André Giese, and Volker Buck — Faculty of Physics and CENIDE, University of Duisburg-Essen, Lotharstr. 1, 47057 Duisburg, Germany

In this work the deposition of carbon nanowalls (CNWs) by an inductively-coupled-plasma-assisted chemical vapor deposition process (ICP-PECVD) is investigated. The CNWs are electrically conducting and show a large specific surface area, which is a key characteristic to make them applicable for sensors, catalysts or energy storage systems. Here, CNWs are deposited from the single source metalorganic precursor aluminum-acetylacetonate. This precursor in combination with the ICP-PECVD is relatively unknown in literature. Silicon, stainless steel, nickel and copper can be used as substrate materials without any pretreatment. The deposited CNWs are characterized by SEM, Raman spectroscopy and AES. The combination of Bias-voltage, substrate temperature, and substrate material revealed a strong influence on the morphology of the nano-graphitic CNWs, strongly influencing the surface area. With regard to these results, a first growth model for the deposition of CNWs by ICP-PECVD using aluminum-acetylacetonate is proposed that takes the surface diffusion into account.