Dresden 2017 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 41: Layer Properties: Electrical, Optical, and Mechanical Properties II
DS 41.3: Vortrag
Donnerstag, 23. März 2017, 15:30–15:45, CHE 91
Controlling the Conductivity of Ti3C2 MXenes by Inductively Coupled Oxygen and Hydrogen Plasma Treatment and Humidity — •Florian M. Römer1, Ulf Wiedwald1, Tanja Strusch1, Joseph Halim2, Elisa Mayerberger2, Michel W. Barsoum2, and Michael Farle1 — 1Faculty of Physics and Center for Nanointegration (CENIDE), University of Duisburg-Essen, Lotharstr. 1, 47057 Duisburg, Germany — 2Department of Materials Engineering, LeBow Engineering Center 27-445, Drexel University, Philadelphia, PA 19104-2875, United States of America
Herein we report on the conductivity of plasma and humidty treated Ti3C2 MXene thin films of 13 nm thickness. The latter were produced by spincoating a colloidal solution, which was made by LiF/HCl etching of Ti3AlC2 powders. We exposed the films to oxygen and hydrogen plasma, measured the resistivity and investigated them by X-Ray photoelectron spectroscopy. We found that the metallic resistivities can be switched reproducibly by plasma treatment between 5.6µΩ m (oxidized state) and 4.6µΩ m (reduced state).
By removing the relative humidity from 80% down to ultra high vacuum conditions, we decreased the resistance from 6340Ω to 243Ω – a 26 fold reduction. This makes MXenes a possible candidate as high precision nano sized humidity and gas sensors.