Dresden 2017 – scientific programme
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DS: Fachverband Dünne Schichten
DS 44: Postersession II
DS 44.10: Poster
Thursday, March 23, 2017, 17:00–19:00, P1C
Interface formation of Titanium and Tantalum thin films onto LiNbO3 — •Uwe Vogel1, Steffen Oswald2, Thomas Gemming3, and Jürgen Eckert4 — 1Helmholtz-Zentrum Berlin / IFW Dresden / TU Dresden — 2IFW Dresden — 3IFW Dresden / TU Dresden — 4ÖAW / IFW Dresden / TU Dresden
We present results of detailed chemical interface analyses of sputtered Tantalum and Titanium thin films as potential adhesion and barrier layers onto cleaned SAW-substrate material (LiNbO3) with respect to their temporal (up to 24 h) and thermal stability up to 600°C in vacuum. The main technique for surface clean is a special Helium plasma, the analysis is done using AR-XPS.