Dresden 2017 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 38: Zinc Oxide

HL 38.3: Vortrag

Dienstag, 21. März 2017, 10:00–10:15, POT 06

Polymer passivated zinc oxide thin film transistors — •Torsten Balster, Jonas Köhling, Marlis Ortel, and Veit Wagner — Department of Physics and Earth Sciences, Jacobs University Bremen gGmbH, Campus Ring 1, 28759 Bremen, Germany

Thin film transistors with ZnO as active layer were prepared by pulsed spray pyrolysis method, in order to investigate the passivation of surface trap states. These states are known to have significant influence on mobility, hysteresis and stability of transistors. Promising candidates for the passivation are polymer classes containing an oxygen with free electron pairs, which can coordinate with Zn-atoms at the surface.
After the pulsed spray pyrolysis deposition of the ZnO films, poly methyl methacrylate, which has a carbonyl group in the monomer, was spin-coated from solution onto the TFT and annealed afterwards. After this treatment, no hysteresis and only a minor onset voltage variation during bias stress could be observed. However, the onset was shifted to lower values in comparison to the untreated surface. Furthermore, the influence of the molecular chain length and the solvent on the electronic properties will be discussed.