Dresden 2017 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 79: Poster: New Materials

HL 79.14: Poster

Donnerstag, 23. März 2017, 15:00–19:00, P2-OG3

Structural and optical properties of TiN/MgO superlattices — •Florian Jung, Vitaly Zviagin, Michael Bonholzer, Chris Sturm, Jörg Lenzner, Rüdiger Schmidt-Grund, Michael Lorenz, and Marius Grundmann — Universität Leipzig, Institut für Experimentelle Physik II, Leipzig, Germany

We present an investigation of structural and optical properties of TiN/MgO superlattices grown by pulsed laser deposition on MgO(100)-substrates. Multilayers and superlattices are grown in an argon atmosphere and their growth is in-situ monitored using reflection high energy electron diffraction. The films' structural properties are evaluated using X-ray diffraction, X-ray reflectometry, atomic force microscopy and reciprocal space mapping techniques. Systematic studies of the dependence of optical properties of the films on process parameters are performed using ellipsometry.

Periodic metal/dielectric planar metamaterials are known to be adjustable such that they exhibit a hyperbolic dispersion and thus anisotropic optical behaviour. Material stacks on a sub-wavelength scale realising such a dispersion are referred to as hyperbolic metamaterials (HMMs). Titanium nitride has already been applied as a plasmonic component in previous studies[1]. Our results show, that MgO/TiN superlattices are promising for application as HMMs.

[1] G. V. Naik et al., PNAS, Vol. 111, No. 21, 7546-7551 (2014)