Mainz 2017 – wissenschaftliches Programm

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MS: Fachverband Massenspektrometrie

MS 4: New Methods and Technical Developments

MS 4.2: Vortrag

Dienstag, 7. März 2017, 15:00–15:15, RW 2

Exploring MeV-SIMS with a capillary microprobe — •Klaus-Ulrich Miltenberger, Martina Schulte-Borchers, Arnold Milenko Müller, Matthias George, Max Döbeli, and Hans-Arno Synal — Laboratory of Ion Beam Physics, ETH Zürich, Switzerland

Over the course of the last two years, the new MeV-SIMS capillary microprobe setup CHIMP (Capillary Heavy Ion MeV-SIMS Probe) was developed and built at the ETH Zurich 6 MV TANDEM accelerator facility. The setup enables the use of a large variety of primary ions with energies of up to 80 MeV and even molecular or cluster ions (e.g. C₆₀) to enhance molecular secondary ion yields. The heavy and energetic MeV ion beams are collimated using a glass micro-capillary to diameters on the order of 1 to 10 µm, while molecular imaging with good spatial resolution is enabled by a piezo sample raster stage.

For mass spectrometry of the positive secondary ions a time-of-flight (ToF) spectrometer is used, which can be operated both in pulsed or continuous mode. While in pulsed mode the start time is derived from the pulsed primary ion beam, in continuous beam mode the start signal is either obtained from a transmission Bragg gas ionization detector (for thin samples) or from a channeltron detecting secondary electrons from the sample surface. This allows measurements with very high duty cycles and efficiencies.

The CHIMP setup as well as measurements characterizing its performance will be presented.