Berlin 2018 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 23: Lithography II: Focused Electron Beam Induced Processing: 3D Nano-Printing for Material Science (Focussed Session): Afternoon Session (joint session DS/KFM)

DS 23.3: Vortrag

Mittwoch, 14. März 2018, 15:30–15:45, H 2032

Electron-induced reactions of surface-grown metal organic layers — •Kai Ahlenhoff and Petra Swiderek — University of Bremen, Institute for Applied and Physical Chemistry, Bremen, Germany

Metal-containing coordination materials grown on surfaces using layer-by-layer self-assembly processes are advantageous for focused electron beam deposition (FEBID) processes for several reasons. First, multilayer materials can serve as precursors which enable high processing speed due to their large surface density [1]. Also, an adlayer on a substrate used in a regular FEBID process relying on volatile precursors can suppress secondary electron emission from the underlying solid and thus lead to more precisely defined deposit shapes [2]. Third, the layer may be activated by an electron beam to provide a template for area-selective autocatalytic deposit growth in an EBISA process [2].

Despite these advantages, little is known about the electron-induced reactions in such materials and the resulting products. Therefore, this contribution presents studies on electron-induced desorption (ESD) from and post-irradiation reflection absorption infrared spectroscopy (RAIRS) of several surface grown metal-organic coordination polymers such as copper(II)oxalate [3] and HKUST-1 [4] but also including novel FEBID precursors.

References: [1] M. Bresin et al. Nanotechnol. 24 (2013) 035301. [2] M. Drost et al., SMALL Methods 1 (2017) 1700095. [3] K. Rückriem et al., Beilstein J. Nanotechnol. 7 (2016) 852. [4] B.W. Jacobs et al., Nanotechnol. 22 (2011) 375601.

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