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HL: Fachverband Halbleiterphysik
HL 24: Poster Session II
HL 24.24: Poster
Tuesday, March 13, 2018, 18:30–20:30, Poster F
Soft- and Hardware Development of a Compact Ultra High Vacuum Pressure Monitoring for Process Control of the Molecular Beam Epitaxy — •Christoph Ringkamp1,2, Arne Ludwig1,2, and Andreas Wieck1,2 — 1Ruhr-Universität Bochum — 2Lehrstuhl für Angewandte Festkörperphysik
Monitoring the pressure is an important part to ensure quality while growing semiconductor structures with a molecular beam epitaxy system. For this matter, we have built a compact real-time monitoring system for an ultra-high vacuum out of a Raspberry Pi. The use of a 12-bit A/D in combination with using Python for the software allowed us to have a good resolution at a high sample rate. Continuous reading and averaging increase the 12-bit depth to an effectively higher value. Furthermore one has to deal with an enclosed measurement system of which one cannot test if it is fully calibrated. By comparing the analog signal to the electrometer display in addition with the instructions we tried to compensate for the lack of comparability as we adjusted the linear factor of the voltage-pressure relation.