# Erlangen 2018 – wissenschaftliches Programm

## Bereiche | Tage | Auswahl | Suche | Aktualisierungen | Downloads | Hilfe

# P: Fachverband Plasmaphysik

## P 19: Codes and Modelling - Poster

### P 19.3: Poster

### Mittwoch, 7. März 2018, 16:15–18:15, Zelt Ost

**Simulation of inductive rf coupling in low pressure low temperature hydrogen plasmas** — •Dominikus Zielke^{1}, Stefan Briefi^{1,2}, David Rauner^{1,2}, and Ursel Fantz^{1,2} — ^{1}AG Experimentelle Plasmaphysik, Universität Augsburg, 86135 Augsburg — ^{2}Max-Planck-Institut für Plasmaphysik, Boltzmannstr. 2, 85748 Garching

Inductively coupled hydrogen plasmas are applied in many diverse fields, among them are materials processing and ion sources for accelerators or neutral beam heating systems for fusion. In general, it is desirable to maximize the power transfer efficiency η, i.e. the ratio of power absorbed by the plasma to the power delivered by an rf generator. Many quantities such as plasma and antenna geometry, delivered rf power, rf frequency and gas pressure influence η. In order to understand these influences quantitatively, a numerical model has been set up which simulates the inductive coupling between the antenna and the plasma self-consistently. The low pressure low temperature plasma is described using a stationary multi-fluid approach, i.e. continuity equations are used for the neutral and charged species. The electromagnetic part, which is described by Maxwell’s equations in the frequency domain, is coupled to the fluid part by means of the electron energy balance. The highly nonlinear model is implemented using the finite element method and the solver of the COMSOL Multiphysics Software package. The contribution covers the model verification as well as the validation against experimentally obtained results from a cylindrical ICP.