Erlangen 2018 – scientific programme

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P: Fachverband Plasmaphysik

P 3: Plasma Wall Interactions I / Astrophysical Plasmas

P 3.3: Talk

Monday, March 5, 2018, 14:30–14:45, A 0.112

Separated effects of particle species on plasma deposited coatings — •Beatrix Biskup, Christian Maszl, Wolfgang Breilmann, Julian Held, Marc Böke, Jan Benedikt, and Achim von Keudell — Experimental Physics II - Reactive Plasmas, Ruhr-University Bochum, 44780 Bochum, Germany

This work investigates the influence of different plasma particle species, namely neutrals, ions, metastables and (V)UV-photons, on the properties of plasma deposited coatings. To separate the different species and their influence on plasma treatment and film growth, we build an ion-repelling grid system (IReGS), which repels ions from the substrate.

In a first approach the deposition rate in a high power impulse magnetron sputtering (HiPIMS) process of chromium was measured with the composition of the IReGS and a quartz crystal microbalance (QCM). With this setup it is possible to measure the ionized metal flux fraction (IMFF). In comparison with measured ion fluxes by mass spectrometry and spoke image data we see the direct influence of the anomalous transport through spokes on the IMFF.