Freiburg 2019 – wissenschaftliches Programm
FM 12.3: Talk
Montag, 23. September 2019, 14:45–15:00, 2006
Fabrication of diamond AFM tips and nanopillars as hardware platforms for quantum sensing and memory — •Alexander Schmidt, Johann P. Reithmaier, and Cyril Popov — Institute of Nanostructure Technologies and Analytics (INA), University of Kassel, Heinrich-Plett-Str. 40, 34132 Kassel, Germany
We report on the fabrication of mono- and nanocrystalline diamond AFM tips and highly dense arrays of nanopillars (200 nm diameter) for implementation in quantum sensing and quantum memories. Both structures are fabricated by electron beam lithography and oxygen plasma reactive-ion etching. They are implemented on nanocrystalline diamond membranes by KOH etching of the silicon substrate for further processing, e.g. mounting the AFM cantilevers or deterministic ion implantation into the pillars. This technique could be transferred to monocrystalline diamond membranes, as demonstrated by preliminary works. Another accessible fabrication method for nanocrystalline AFM tips involving the moulding technique, conventional optical lithography and anisotropic wet etching in KOH of the silicon substrate will also be presented. Upon incorporation of nitrogen-vacancy centers, those structures can be envisioned for quantum sensing of magnetic fields at a nanoscale or implementation as quantum memories.