München 2019 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 18: Postersitzung

P 18.16: Poster

Donnerstag, 21. März 2019, 16:30–18:30, Foyer Audimax

Simulation of particle and photon fluxes in low-pressure plasmas for sterilisation applications: scaling and spatial distribution — •Andrew R. Gibson, Marcel Fiebrandt, and Peter Awakowicz — Institute of Electrical Engineering and Plasma Technology (AEPT), Ruhr-Universität Bochum, Germany

Sterilisation of medical devices and implants is crucial before performing surgical procedures. In the context of the currently rising incidence of antibiotic-resistant infections, effective sterilisation procedures are increasingly important. Low-pressure, low-temperature plasmas have been demonstrated to be effective for sterilisation of a range of surfaces, including those that are temperature sensitive. A key mechanism behind their effects is their ability to deliver large doses of UV/VUV radiation. In this work, two-dimensional hybrid plasma simulations are used to study the scaling and spatial distribution of VUV photon, Ar metastable and ion fluxes to various test surfaces in low-pressure Ar inductively coupled plasmas. The base case simulation represents a double coil inductively coupled plasma source, with one coil at the top and another at the bottom, operated at a pressure of 5 Pa and a total power deposition of 500 W. A cylindrical substrate is held in the centre of the reactor, representing an object to be sterilised. It is found that two coils are required in order to ensure high photon fluxes to all surfaces of the substrate, and that photon fluxes are strongly power and pressure dependent. Particle and photon fluxes inside trenches of various aspect ratios introduced into the substrate will also be discussed in the context of ensuring homogenous sterilisation.