# München 2019 – wissenschaftliches Programm

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# P: Fachverband Plasmaphysik

## P 9: Atmospheric Pressure Plasmas II - Helmholtz Graduate School III

### P 9.3: Vortrag

### Dienstag, 19. März 2019, 11:45–12:00, HS 21

**Analysis of a dielectric barrier discharge in argon for wide pressure and frequency ranges** — •Marjan Stankov, Markus M. Becker, Robert Bansemer, and Detlef Loffhagen — Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany

Dielectric barrier discharges (DBDs) are widely used plasma sources e.g. in plasma medicine, for surface treatment and ozone generation. Here, a laboratory DBD is investigated by means of fluid modelling and electrical measurements. It has a symmetric plane-parallel geometry with electrodes covered by quartz glass dielectric. A specific feature of this device is that gas pressure and frequency of the sinusoidal voltage signal can easily be adapted in the pressure range from 100 to 1000 mbar and for frequencies between 10 and 100 kHz. Argon is used as a reference gas. The time-dependent, spatially one-dimensional fluid model comprises balance equations for the particle densities and the electron energy density involving the drift-diffusion approximation for the fluxes. Poisson’s equation is solved to determine the axial electric field, and the accumulation of surface charges on the dielectric surfaces is included as a boundary condition. First modelling results of the electrical discharge characteristics are presented and discussed providing a detailed understanding of surface and volume memory effects over the whole pressure and frequency range. In general, good agreement with measurements of the discharge current are obtained.

Funded by the Deutsche Forschungsgemeinschaft (DFG) - project number 368502453.