Regensburg 2019 – scientific programme

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DS: Fachverband Dünne Schichten

DS 19: Focus Session: Direct-Write Nanofabrication and Applications II
(Electron Beam Induced Processing) (joint session DS/TT)

DS 19.7: Talk

Wednesday, April 3, 2019, 17:15–17:30, H32

Which molecular structures in metal organic compounds are favourable for electron-induced decomposition? — Kai Ahlenhoff and •Petra Swiderek — University of Bremen, Institute for Applied and Physical Chemistry, Bremen, Germany

Electron beam induced processing calls for precursor molecules or materials that can be converted to a deposit with well-defined final composition. An approach to this problem is to use ligands which fragment to non-reactive and volatile products leaving behind only the desired material. This concept can guide the design of precursor materials. We have started to investigate this hypothesis by comparing the electron-induced decomposition of surface-grown copper-containing coordination materials that are constructed using different organic counterions, namely, copper(II)oxalate, copper(II)squarate, and HKUST-1 [1]. As a second class of compounds, silver carboxylates with different organic side chain have been considered. Using these examples, we discuss in this contribution a new concept for precursor design. [1] K. Ahlenhoff et al., Phys. Chem. Chem. Phys., submitted.