Regensburg 2019 – scientific programme

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DS: Fachverband Dünne Schichten

DS 19: Focus Session: Direct-Write Nanofabrication and Applications II
(Electron Beam Induced Processing) (joint session DS/TT)

DS 19.9: Talk

Wednesday, April 3, 2019, 17:45–18:00, H32

Amidinate and carboxylate coordination compounds for focused electron beam induced deposition (FEBID) — Katarzyna Madajska and •Iwona Szymańska — Faculty of Chemistry, Nicolaus Copernicus University in Toruń, Gagarina 7, 87-100 Toruń, Poland

Focused electron beam induced deposition (FEBID) is said to play a fundamental role for making sophisticated 2D and 3D nanostructures with an ultimate resolution of less than 1 nm. It is frequently so-called *3D nanoprinting*.[1] The choice of the precursor is crucial for the success of FEBID: its chemical nature and dissociation behavior determine the composition of the deposit.[2]

Research was focused on the copper(II), silver(I) and rhenium(III) complexes with an amidinate and/or carboxylate ligands, which seems to be promising for a FEBID process. Mass spectrometry (EI MS) exhibited in the gas phase following ions: [Cux(NH2(NH=)CR1)y(O2CR2)z]+, [Agx(NH(NH=)CR1)y(O2CR2)z]+, [Agz(NH(NH=)CR1)y]+, [Re2Clx(NH(NH=)CR1)y], where R1, R2 = perfluorinated aliphatic groups. Sublimation experiments and temperature-variable infrared spectroscopy were carried out to determine compounds volatility and decomposition mechanisms.

References [1] D. Belić, M. M. Shawrav, E. Bertagnolli, H. D. Wanzenboeck, Beilnstein J. Nanotechnol, 8 (2017) 2530*2543. [2] I. Utke, P. Hoffmann, J. Melngailis, J. Vac. Sci. Technol. B, 26 (2008) 1197*1276.