Regensburg 2019 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 25: Thin Film Properties: Structure, Morphology and Composition (XRD, TEM, XPS, SIMS, RBS, AFM, ...) Part II
DS 25.5: Vortrag
Freitag, 5. April 2019, 10:30–10:45, H32
X-ray spectroscopic composition analysis of amorphous ZnSnOy grown by magnetron sputtering — •Ainur Zhussupbekova1, Aitkazy Kaisha1, Karsten Fleischer1,2, Igor V. Shvets1, and David Caffrey1 — 1School of Physics and Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN), Trinity College Dublin, Dublin 2, Ireland — 2School of Physics, Dublin City University, Dublin 9, Ireland
The conductivity of Amorphous Transparent Conducting Oxide (a-TCO) materials is not dependent on their long range crystallographic order, making them ideal materials for flexible electronics. A potential candidate to take a prominent place in this field is amorphous ZnSnOy (a-ZTO) because, unlike amorphous InGaZnO4 (a-IGZO), it does not contain any non-abundant or expensive components such as indium.
In this study, X-ray Photoelectron Spectroscopy (XPS) is used to perform an extensive composition analysis of a-ZnSnOy grown by reactive and non-reactive magnetron sputtering. An identical maximum conductivity of 225 S/cm is achieved via both techniques. However, analysis of the a-ZnSnOy composition reveals that the distinct Zn/Sn ratios at which this maxima occurs varies depending on growth technique. The Zn/Sn ratios observed at each maxima have been found to correspond to theoretical unstable polymorphs of a-ZnSnOy. We confirm the existence of two corresponding distinct local bonding arrangements depending on deposition methodology via Raman spectroscopy.